창성주식회사

PRODUCT

  • PRODUCT SEMICONDUCTOR

Diffusion

ETCH

  • PRODUCT SEMICONDUCTOR DIFFUSION

1. Pre Diffusion Wetstation

확산전 세정장비를 말하며 주로 SC-1, HF 약액 처리를 이용한 세정 장비

Wet Cleaner is remove the particles on the surface of the wafer in the bath

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

2. Tube Cleaner

Furnace에서 확산공정전에 Quartz tube, Quartz tool 등을 HF,HNO3등의 약액처리를 이용하여 tube에 잔존하는 Polymer 등을 제거하기 위한 세정장비

Wet Cleaner is remove the particles on the surface of the wafer in the bath

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

3. Part Cleaner

공정 전 후에서 약액 및 DI.W를 이용하여 Process Kit등을 세정하는 장비

Wet Cleaner is remove the particles on the surface of the wafer in the bath

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

  • PRODUCT SEMICONDUCTOR ETCH

1. Solvent Wetstation

금속(Metal) 증착 후 PR(Photo resister)을 제거하는 공정의 장비로서 Solvent, IPA등의 약액으로 불순물과 표면세정을 하는 장비.

Wet Cleaner is remove the particles on the surface of the wafer in the bath

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

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