- PRODUCT Sola
Texturing
PSG
Texturing
PSG
利用KOH, HF等Chemical,进行Texturing后DI.W Rinse洗净,干燥就喷放的装备。
Wet Cleaner is removing about particle on the bath & textures the wafer surface
利用HF, DI.W等,除掉氧化膜后 Rinse洗净,干燥就喷放的装备
Wet Cleaner is remove the oxide film and particles on the surface of the wafer in the bath