창성주식회사

PRODUCT

Texturing

PSG

※Solar 工艺

Texturing

1. SDR

利用KOH, HF等Chemical,进行Texturing后DI.W Rinse洗净,干燥就喷放的装备。

Wet Cleaner is removing about particle on the bath & textures the wafer surface

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

2. Texturing 结构和形象

1. PSG

利用HF, DI.W等,除掉氧化膜后 Rinse洗净,干燥就喷放的装备

Wet Cleaner is remove the oxide film and particles on the surface of the wafer in the bath

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

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