창성주식회사

PRODUCT

  • PRODUCT Sola

Texturing

PSG

  • PRODUCT Sola Texturing
※Solar 공정

Texturing

1. SDR

KOH、HFなどのChemicalを利用してTexturingを実施後、DI.W Rinse洗浄、乾燥して抽出する装備

Wet Cleaner is removing about particle on the bath & textures the wafer surface

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

2. Texturing 構造や形状

  • PRODUCT Sola PSG

1. PSG

HF、DI.Wなどを利用して酸化膜を除去後Rinse洗浄、乾燥して抽出する装備

Wet Cleaner is remove the oxide film and particles on the surface of the wafer in the bath

  • Size dimension may vary per customer's option
  • Automatic Transfer by WTR
  • Non Contact Transfer : CST Transfer system
  • Full automated by PLC & CIM PC
  • Hot Diw & Chemical (option)
  • System : Sonic, Bubble Jet, Spray, Dry (option)

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